Description
The Zygo ZMI-4104 (often referenced with part number 8020-0700-01 or as the ZMI-4104C variant) is a high-performance displacement measuring board designed for ultra-precision metrology and nano-positioning applications. Operating as part of Zygo’s ZMI (Zygo Measuring Interferometer) series, this VME/VME64x-compatible bus module processes optical interference signals driven by stabilized laser sources to calculate sub-nanometer linear, angular, or multidimensional position data. It is heavily utilized in semiconductor manufacturing equipment (such as wafer steppers and lithography scanner stages), precision CNC machining centers, and advanced research lab environments.
Product Specifications
| Parameter | Value |
| Manufacturer | Zygo Corporation |
| Product Series | ZMI™ Displacement Measuring Interferometer System |
| Catalog / Part Number | ZMI-4104 (Base PCB: 8020-0700-01) |
| Form Factor | VME / VME64x bus architecture module (6U card format) |
| Resolution | Sub-nanometer resolution (<0.1 nm capability depending on optics setup) |
| Measurement Axes | Multi-axis support configurable for linear, flat mirror, or angle interferometers |
| System Compatibility | Compatible with Zygo ZMI laser sources, receiver optics, and MetroPro / Mx™ software suites |
| Error Reduction | Built-in loop error reduction options for nonlinear error elimination |
| Operating Temperature | +15 to +30 °C (typical controlled metrology environment) |
| Compliance Standards | CE, RoHS (verify with OEM specific build configuration) |
Commercial & Logistics Information
- Condition: New Surplus, Factory Original, or Fully Tested Refurbished Hardware
- Availability: Subject to specialized high-tech surplus inventory; availability fluctuates due to specialized semiconductor and metrology market demand
- Standard Lead Time: 1 to 5 business days for stock items; specialized sourcing may require extended delivery windows
- Warranty: 1-year standard vendor or repair warranty (verify specific terms with your procurement agreement)
- Pricing Note: Listed price is indicative and volatile due to the specialized nature of precision metrology boards. Contact our engineering sales desk for a formal quotation and current stock availability.
Technical Application & Integration Notes
The ZMI-4104 slides directly into a standard VME64x chassis backplane, where it accepts quadrature or serial optical signals originating from remote laser interferometer optics. When installing or replacing this module, observe strict electrostatic discharge (ESD) handling protocols, as sensitive high-speed digital and analog signal processors populate the board.
Ensure that firmware and software configurations match the exact axis mapping required by your stage controller. For optimal sub-nanometer performance, verify that environmental compensation parameters (such as air temperature, pressure, and humidity refractive index corrections) are correctly calibrated through the system host interface.
Frequently Asked Questions
Q: What is the primary function of the ZMI-4104 inside a motion control loop?
A: The board processes raw optical fringes from laser interferometers to deliver real-time, high-resolution position data back to a master motion controller or CNC/stage computer, facilitating closed-loop sub-nanometer positioning.
Q: Is the ZMI-4104 backward compatible with older Zygo VME racks?
A: Yes, it is designed for standard VME64x bus integration, but system architects should verify that rack power supplies and system controller firmware revisions support the specific board revision.
Q: How are non-linear errors handled by this module?
A: The ZMI architecture supports advanced processing algorithms, including patented loop error reduction features, to actively minimize cyclic errors inherent in displacement measuring interferometry.
