Description
1.Unboxing & Physical Snapshot (Dynamic List)
- Brand & Model: MKS Instruments / R*evolution III Integrated Remote Plasma Source (RPS) — AX7695PSK-01
- Physical Dimensions: Integrated heavy-duty compact chamber and RF generator enclosure module profile (approx. 35.0 cm x 30.0 cm x 25.0 cm)
- Estimated Shipping Weight: 14.5 kg (31.96 lbs) (Packaged within custom high-density shock-absorbing foam and reinforced heavy-duty corrugated outer casing)
- What’s in the Box: Fully integrated remote plasma source module featuring quartz vacuum chamber, built-in RF power supply, interconnect cabling harnesses, process gas fittings, and factory compliance documentation tags. (Note: External gas line mass flow controllers and high-vacuum mating flanges are sold separately).2.Product Introduction
Advanced semiconductor wafer processing, thin-film deposition, and chamber cleaning applications rely on integrated remote plasma sources to deliver high-purity atomic radicals safely without ion-bombardment damage. Semiconductor tool technicians mount this self-contained unit directly onto process chamber ports, utilizing its high dissociation efficiency to supply reactive oxygen or nitrogen radicals for critical manufacturing recipes.
System reliability mandates utilizing authentic OEM MKS hardware rather than unverified third-party refurbishments. Deploying this exact AX7695PSK-01 remote plasma source configuration ensures precise gas flow handling, stable RF power delivery, and repeatable radical densities across demanding sub-micron fabrication cycles.
3.Core Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer / Product Family | MKS Instruments / R*evolution III Remote Plasma Source (RPS) Series |
| Catalog Model / Part Number | AX7695PSK-01 (Variant specific configuration) |
| Core Technology | Integrated quartz vacuum chamber and RF power supply module |
| Process / Ignition Gas Support | 100% O_2, Argon, or 90% O_2 / 10% N_2 mixtures |
| Maximum Gas Flow Rate | Up to 6.0 standard liters per minute (slm) |
| Operating Pressure Range | 0.5 to 2.0 Torr (Dissociation efficiency >95% at 1–10 Torr) |
| Operating Temperature | +15°C to +40°C cleanroom environmental threshold |
| Approximate Unit Weight | 14.5 kg (31.96 lbs) |
- Global Compliance & Industry CertificationsAuditors and semiconductor cleanroom safety officers require rigorous documentation verifying that high-frequency plasma generation equipment meets international electrical safety and vacuum integrity standards. This unit aligns with major industrial benchmarks, carrying expected designations such as the CE Mark for European conformity, SEMI S2/S8 safety and ergonomics guidelines, and rigorous Electromagnetic Compatibility (EMC) standards.
A verified compliance rating guarantees that internal RF shielding and high-voltage isolation barriers will suppress electromagnetic interference, protecting sensitive fab tool controllers from signal corruption. Verify specific lot certifications with OEM.
5.Long-Term Storage & Asset Preservation Guide (E-E-A-T Goldmine)
Precision plasma sources and integrated RF modules sitting dormant in facility stockrooms require strict environmental discipline to prevent vacuum port contamination, quartz envelope stress, and electronic component degradation. Keep the module hermetically sealed inside its original factory anti-static moisture-barrier packaging with all vacuum ports blanked off using cleanroom-grade flange covers. Maintain stockroom climate controls with ambient temperatures stable between 15°C and 25°C and relative humidity strictly below 40 percent to protect internal circuitry from micro-corrosion. If this unit remains unpowered in stock beyond three years, maintenance engineers must inspect the quartz chamber seals and verify internal RF power supply capacitor health before fab deployment.
- Physical Installation PrerequisitesMount the plasma source securely onto the designated vacuum tool process chamber port using cleanroom-compliant hardware, ensuring proper O-ring compression and flange alignment. Verify that the protective earth (PE) ground strap bolts tightly to the tool frame to suppress high-frequency RF leakage, and connect ultra-high-purity gas delivery lines through leak-checked VCR fittings prior to system ignition.
- Buyer’s FAQ (Logistics & Compliance Focus)
- What Harmonized System (HS) tariff code governs international shipments of this plasma source? Semiconductor manufacturing apparatus parts and specialized plasma generators generally fall under HS code 8479.89 or 8543.80 (electrical machines and apparatus having individual functions), though customs brokers should verify exact local classifications.
- Does the module ship pre-loaded with recipe parameters or firmware? The unit arrives with core system firmware installed, but equipment engineers must configure gas type selectors, interlocks, and power setpoints via the tool’s host interface during installation.
- How does the Country of Origin (COO) documentation affect trade compliance? Official manufacturing country declarations must match commercial export invoices precisely to clear customs inspections smoothly without secondary tariff reviews or border delays.
- What level of freight insurance is advised during transit? Full-value commercial cargo insurance paired with shock-impact indicator labels and tilt sensors is mandatory to protect fragile internal quartz chambers and heavy RF electronics against rough handling during freight delivery.
