Description
MKS Instruments 979B-01-0013 – Series 979B MicroPirani/Cold Cathode Vacuum Transducer
2. Product Overview
The 979B-01-0013 is a high-performance, wide-range vacuum transducer from the MKS HPS® Series 979B. Its primary function is to provide accurate pressure measurements across a vast range, from atmospheric pressure down to 1 \times 10^{-10} Torr. It achieves this by combining two distinct sensing technologies into a single compact unit: a MicroPirani™ sensor for higher pressures and a Cold Cathode (inverted magnetron) sensor for high vacuum.
In semiconductor manufacturing and thin-film coating processes, maintaining specific vacuum levels is critical to prevent contamination and ensure process repeatability. The 979B-01-0013 solves the problem of needing multiple individual gauges and complicated manifold setups. It features a specialized analog output and digital communication capabilities (RS485), allowing for seamless integration into sophisticated vacuum control systems.
3. Technical Specifications
- Brand: MKS Instruments
- Model: 979B-01-0013
- Warranty: One Year
- Condition: 100% New & Original
- Measurement Range: 1 \times 10^{-10} to 1,000 Torr
- Sensors: Combined MicroPirani (thermal) and Cold Cathode (ionization)
- Flange Type: NW16KF (Standard vacuum fitting)
- Communication: RS485 Digital Interface
- Analog Output: 0.5 to 9.5 VDC (Buffered analog output)
- Input Power: 24 VDC (Nominal)
- Setpoints: Three independent relay setpoints for process control
- Operating Temp: 0°C to +40°C (32°F to 104°F)
4. Key Features & Benefits
- Full-Range Measurement: The 979B-01-0013 eliminates the need for separate low-vacuum and high-vacuum gauges, reducing the physical footprint on the vacuum chamber and simplifying wiring.
- MicroPirani Technology: Unlike traditional wire Pirani gauges, the MicroPirani sensor in this module is highly resistant to vibration and “burn-out,” providing longer life and better accuracy at higher pressures.
- User-Programmable Setpoints: Includes three integrated relays that can be programmed to trigger at specific pressure levels, allowing for automated valve control or system safety interlocks directly from the transducer.
5. Application Scenarios
- Semiconductor Etching/CVD: Used to monitor the transition from roughing pressure to high-vacuum processing levels, ensuring the chamber is sufficiently evacuated before hazardous gases are introduced.
- Mass Spectrometry: Provides the precise pressure feedback required to protect sensitive ion sources and detectors from accidental exposure to high-pressure bursts.
- Vacuum Furnaces: Manages the vacuum environment during heat treatment or brazing processes, ensuring consistent product quality in aerospace and automotive manufacturing.
6. Frequently Asked Questions (FAQ)
- Q: What is the primary function of the 979B-01-0013?
- A: The 979B-01-0013 is a wide-range vacuum gauge used to measure pressure from atmosphere down to ultra-high vacuum (1 \times 10^{-10} Torr) using a dual-sensor design.
- Q: Is the 979B-01-0013 compatible with standard vacuum controllers?
- A: Yes, it is compatible with MKS PDR900 and Series 900 controllers, as well as any third-party PLC or DCS that accepts RS485 or standard analog voltage inputs.
- Q: Can the Cold Cathode sensor be serviced?
- A: Yes, the 979B-01-0013 is designed with a removable/replaceable sensor head, allowing for easy cleaning or replacement of the cold cathode anode assembly if it becomes contaminated by process byproducts.
