Description
The Advanced Energy 3156310-117 is a high-frequency (HF) Paramount 1513 RF plasma generator. It provides precise power delivery, fast response times, and highly stable RF output for thin-film deposition and etching processes within semiconductor, flat-panel display, and solar cell manufacturing environments.
Commercial Supply Status
- Condition: New Surplus (Factory Sealed) or Refurbished (Fully Bench Tested)
- Availability: In stock / Available upon request
- Lead Time: 3–5 business days
- Warranty: 12 months
- Pricing Note: Price subject to market conditions; contact us for a firm quote.
Field Engineering & Integration Notes
In wafer fabrication and plasma etch applications, the Paramount 1513 series interfaces directly with a matching network (tuner) to minimize reflected power during fast plasma ignition transients. The 3156310-117 hardware build incorporates specialized internal DSP control algorithms designed to adapt to rapid impedance shifts within the plasma chamber.
During a 2 AM troubleshooting cycle involving output power faults or arc-detection trips, engineers should inspect the RF output connector (typically a 7/16 or N-type interface) for signs of dielectric degradation or micro-arcing caused by loose connections. Ensure that the cooling water loop meets the minimum flow rate and differential pressure specifications; insufficient cooling will cause the internal thermal sensors to trip the main interlock, instantly dropping output power to prevent damage to the RF power transistors. When replacing a generator, verify that the device address and communication baud rate parameters on the rear serial or EtherCAT interface match the host tool architecture configuration.
Technical Specifications
| Parameter | Value |
| Product Platform | Paramount 1513 Series HF Power Delivery System |
| Part Number | 3156310-117 |
| Output Frequency | 13.56 MHz (Standard nominal HF process frequency) |
| Output Power Rating | 1.5 kW (1,500 W) maximum nominal output |
| Input Line Voltage | 3-Phase AC power configuration (verify voltage matrix on unit label) |
| Regulation Modes | Forward Power, Load Power, or DC Bias Regulation |
| Communication Protocols | EtherCAT, DeviceNet, or RS-232 Serial (variant dependent; verify port options) |
| Cooling Medium | Water-cooled (requires industrial deionized/distilled cooling loop) |
| Dimensions (H x W x D) | 133 x 216 x 442 mm (5.25 x 8.5 x 17.4 in) |
| Protection Interlocks | Over-temperature, VSWR limit, RF arc protection, water flow interlock |
Installation & Environmental Requirements
- Cooling Parameters: The cooling water must be maintained within the specified temperature limits (typically +15 to +35 °C) to prevent condensation from forming on internal RF components.
- Impedance Matching: Operating the unit continuously into a high voltage standing wave ratio (VSWR) will limit available output power as the internal protection algorithms automatically scale back power to safeguard the RF amplifier stage.
- Rack Mounting: The generator requires standard mechanical support shelves or brackets when integrated into a standard 19-inch power rack assembly.
Frequently Asked Questions
- Q: Can this generator be used with a matching network from a different manufacturer?
- A: Yes, provided the matching network accepts a standard 13.56 MHz RF input and its control interface is compatible with the generator’s analog or digital tuning command outputs. However, optimal response times during high-speed pulsing operations are achieved when paired with an Advanced Energy matching network.
- Q: What does the suffix “-117” signify in the part number?
- A: In Advanced Energy’s part numbering convention, the suffix codes represent tool-specific modifications. These can include a designated communication interface (e.g., EtherCAT vs. DeviceNet), a particular interlock connector pinout configuration, or custom firmware revisions mandated by the semiconductor tool OEM. Verify the rear panel interface layout against your tool schematics.
- Q: How is an internal arc fault reset?
- A: The generator features automated arc management that can suppress minor arcs instantly. If a hard fault occurs and latches, the error must be cleared via the host controller interface or by toggling the remote interlock line. Verify the specific arc threshold settings in your process recipe documentation before modifying configuration parameters.
